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Swagelok North Carolina | East Tennessee

Your Authorized Swagelok Sales and Service Center

Thermal Immersion Diaphragm Valves

DH Series Diaphragm Valve

An increasing number of applications today require high precursor temperatures, often up to 220°C (428°F), with very tight temperature controls. System designers may specify an oven enclosure for the entire gas system to precisely control these high temperatures. This demands a valve that can be entirely situated within the high temperature environment, including the body and actuator.

Swagelok® thermal-immersion diaphragm valves offer high-speed actuation, flow coefficients up to 0.60, and are designed for optimum performance at 220°C (428°F) for high-temperature processes including atomic layer deposition (ALD) and precursor delivery applications. They are offered in both pneumatically actuated and manual models with a variety of 1/4 and 3/8 in. end connections.

View Technical Data Sheet